Thin Film Materials (PHYS:7905)

Thin films play an important role in many technological applications, including micro- and opto-electronics, and optical and surface coatings, and are the foundation of micro- and nano-fabrication of materials. This course will provide an introduction to growth and properties of thin film materials.  We will examine modes and techniques of growth and deposition of films, including evaporation, plasma interactions, sputtering, chemical vapor deposition, and epitaxy; film structure, defects, nucleation, and characterization; film interdiffusion, reactions, and transport; film stability, stress, relaxation, and properties.